[IEEE 2009 4th IEEE International Conference on Nano/Micro...

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[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - The method of prevent footing effect in making SOI micro-mechanical structure

Xu Mao,, Zhenchuan Yang,, Zhihong Li,, Guizhen Yan,
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Year:
2009
Language:
english
DOI:
10.1109/nems.2009.5068629
File:
PDF, 5.38 MB
english, 2009
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