Microfabrication of high-aspect ratio and complex...

Journal of Microelectromechanical Systems 2002 / 10 Vol. 11; Iss. 5

Microfabrication of high-aspect ratio and complex monolithic structures in glass

Belloy, E., Pawlowski, A.-G., Sayah, A., Gijs, M.A.M.
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Volume:
11
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2002.803418
Date:
October, 2002
File:
PDF, 327 KB
english, 2002
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