![](/img/cover-not-exists.png)
[IEEE 2009 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - San Diego, CA, USA (2009.09.9-2009.09.11)] 2009 International Conference on Simulation of Semiconductor Processes and Devices - A Fast Void Detection Algorithm for Three-Dimensional Deposition Simulation
Ertl, Otmar, Selberherr, SiegfriedYear:
2009
Language:
english
DOI:
10.1109/sispad.2009.5290221
File:
PDF, 185 KB
english, 2009