Polymeric Thermal Microactuator With Embedded Silicon...

Journal of Microelectromechanical Systems 2008 / 08 Vol. 17; Iss. 4

Polymeric Thermal Microactuator With Embedded Silicon Skeleton: Part II—Fabrication, Characterization, and Application for 2-DOF Microgripper

Trinh Chu Duc,, Gih-Keong Lau,, Sarro, P.M.
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Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2008.924275
Date:
August, 2008
File:
PDF, 1.37 MB
english, 2008
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