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[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - Therma-wave dose sensitivity considerations, including energy dependence
Kamenitsa, D., Lillian, P., Luckman, G., Becker, K., Colvin, N., Rendon, M., Bokharey, Z.Year:
2000
Language:
english
DOI:
10.1109/.2000.924243
File:
PDF, 474 KB
english, 2000