Surface topography evolution and fatigue fracture in polysilicon mems structures
Allameh, S.M., Shrotriya, P., Butterwick, A., Brown, S.B., Soboyejo, W.O.Volume:
12
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2003.809957
Date:
June, 2003
File:
PDF, 2.34 MB
english, 2003