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[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - Preparation of high quality amorphous Al/sub 2/O/sub 3/ thin film on silicon and its applications
Qing Wan,, Ninglin Zhang,, Lianwei Wang,, Qinwo Shen,, Chenglu Lin,Volume:
2
Year:
2001
Language:
english
DOI:
10.1109/icsict.2001.982181
File:
PDF, 178 KB
english, 2001