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[IEEE 2011 IEEE Nanotechnology Materials and Devices Conference (NMDC 2011) - Jeju (2011.10.18-2011.10.21)] 2011 IEEE Nanotechnology Materials and Devices Conference - Wet chemical etching silicon wafer with low-reflection and super-hydrophobicity
Wuxing Lai,, Xiaotao Wang,, Tielin Shi,, Wei Zhang,, Zirong Tang,Year:
2011
Language:
english
DOI:
10.1109/nmdc.2011.6155275
File:
PDF, 1.19 MB
english, 2011