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[IEEE 2006 IEEE International Conference on Microelectronic Test Structures - Austin, TX, USA (2006.03.6-2006.03.9)] 2006 IEEE International Conference on Microelectronic Test Structures - On the passivation of interface states in SONOS test structures: impact of device layout and annealing process
Driussi, F., Selmi, L., Akil, N., van Duuren, M.J., van Schaijk, R.Year:
2006
Language:
english
DOI:
10.1109/icmts.2006.1614274
File:
PDF, 312 KB
english, 2006