[IEEE 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2012.09.19-2012.09.21)] 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE) - Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications
Lee, Mai Woon, Razib, Nadia Md, Teh, Aun Shih, Bien, Daniel C. S., Chen, Soo Kien, Abdullah, Shahrul AzamYear:
2012
Language:
english
DOI:
10.1109/smelec.2012.6417080
File:
PDF, 2.14 MB
english, 2012