[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Review on Process-Induced Strain Techniques for Advanced Logic Technologies
Wiatr, M., Feudel, Th., Wei, A., Mowry, A., Boschke, R., Javorka, P., Gehring, A., Kammler, T., Lenski, M., Frohberg, K., Richter, R., Horstmann, M., Greenlaw, D.Year:
2007
Language:
english
DOI:
10.1109/rtp.2007.4383814
File:
PDF, 747 KB
english, 2007