![](/img/cover-not-exists.png)
[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - Silicide synthesis by metal ion implantation and ion deposition
Zhang Tonghe,, Wu Yuguang,, Yi Zhongzhen,, Zhang Shengji,, Wu Xianying,, Zhang Xu,, Zhang Huixing,, Zhang Xiaoji,, Qian Weidong,Volume:
1
Year:
2001
Language:
english
DOI:
10.1109/icsict.2001.981525
File:
PDF, 337 KB
english, 2001