Buried-oxide isolation with etch-stop (BOXES)

IEEE Electron Device Letters 1988 / 02 Vol. 9; Iss. 2

Buried-oxide isolation with etch-stop (BOXES)

Kwasnick, R.F., Kaminsky, E.B., Frank, P.A.
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Volume:
9
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.2041
Date:
February, 1988
File:
PDF, 290 KB
english, 1988
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