Influence of precursors chemistry on ALD growth of cobalt–molybdenum oxide films
Diskus, Madeleine, Balasundaram, Murugan, Nilsen, Ola, Fjellvåg, HelmerVolume:
41
Year:
2012
Language:
english
Journal:
Dalton Transactions
DOI:
10.1039/c2dt11837h
File:
PDF, 896 KB
english, 2012