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[IEEE 2014 IEEE International Frequency Control Symposium (FCS) - Taipei, Taiwan (2014.5.19-2014.5.22)] 2014 IEEE International Frequency Control Symposium (FCS) - Length-extension LGS microresonators for FM-AFM: Microfabrication and shear effects sensitivity
Therese, Leblois, Etienne, Herth, Fabien, Henrot, Fabrice, SthalYear:
2014
Language:
english
DOI:
10.1109/fcs.2014.6859873
File:
PDF, 561 KB
english, 2014