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[IEEE Proceedings., Eighth University/Government/Industry Microelectronics Symposium - Westborough, MA, USA (12-14 June 1989)] Proceedings., Eighth University/Government/Industry Microelectronics Symposium - Focused ion beam lithography and implantation
Melngailis, J.Year:
1989
Language:
english
DOI:
10.1109/ugim.1989.37304
File:
PDF, 699 KB
english, 1989