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[IEEE Extended Abstracts of the Fourth International Workshop on Junction Technology - Shanghai, China (15-16 March 2004)] The Fourth International Workshop on Junction Technology, 2004. IWJT '04. - Estimation of ultra-shallow plasma doping (PD) layer's optical absorption properties by spectroscopic ellipsometry (SE)
Jin, C.G., Sasaki, Y., Tsutsui, K., Tamura, H., Mizuno, B., Higaki, R., Satoh, T., Majima, K., Sauddin, H., Takagi, K., Ohmi, S., Iwai, H.Year:
2004
Language:
english
DOI:
10.1109/iwjt.2004.1306769
File:
PDF, 114 KB
english, 2004