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[IEEE Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 - Beijing, China (21-23 Oct. 1998)] 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) - Nanovoid layer induced by He/sup +/ and H/sup +/ implantation and its gettering effect in SOI wafers
Chenglu Lin,, Miao Zhang,, Xinzhong Duo,, Scholz, R., Gosele, U.Year:
1998
Language:
english
DOI:
10.1109/icsict.1998.786122
File:
PDF, 364 KB
english, 1998