[IEEE 2000 IEEE/LEOS International Conference on Optical MEMS - Kauai, HI, USA (21-24 Aug. 2000)] 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) - Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring
Chang-Hyeon Ji,, Yong-Kweon Kim,, Bum-Kyoo Choi,Year:
2000
Language:
english
DOI:
10.1109/omems.2000.879644
File:
PDF, 208 KB
english, 2000