Characteristics of Low- k Nanoporous...

Molecular Crystals and Liquid Crystals 2002 / 01 Vol. 377; Iss. 1

Characteristics of Low- k Nanoporous Poly(methylsilsequioxane) Thin Films

Min, Sung-Kyu, Park, Jae-Man, Song, Kitae, Jin, Moon Young, Lee, Changjin, Yoon, Do Yeung, Rhee, Hee-Woo
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Volume:
377
Language:
english
Journal:
Molecular Crystals and Liquid Crystals
DOI:
10.1080/713738484
Date:
January, 2002
File:
PDF, 293 KB
english, 2002
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