[IEEE 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Boston, MA, USA (4-6 May 2004)] 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) - Advanced metrology tool for Si/sub 1-x/Ge/sub x/ characterization: Infrared Spectroscopic Ellipsometer (IRSE)
Enicks, D., I-L Teng,, Rubino, J., Sun, L., Defranoux, C., Bourtault, S., Hendrich, P., Stehle, J.-L.Year:
2004
Language:
english
DOI:
10.1109/asmc.2004.1309609
File:
PDF, 400 KB
english, 2004