Real-Time Control of Photoresist Extinction Coefficient...

Real-Time Control of Photoresist Extinction Coefficient Uniformity in the Microlithography Process

Tay, Arthur, Ho, Weng Khuen, Wu, Xiaodong
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Volume:
15
Language:
english
Journal:
IEEE Transactions on Control Systems Technology
DOI:
10.1109/tcst.2006.883244
Date:
January, 2007
File:
PDF, 754 KB
english, 2007
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