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Electronic Scheme for Multiplexed Dynamic Behavior Excitation and Detection of Piezoelectric Silicon-Based Micromembranes
Ayela, CÉdric, Alava, Thomas, Lagrange, Denis, Remiens, Denis, Soyer, Caroline, Ondarcuhu, Thierry, Greve, Anders, Nicu, LiviuVolume:
8
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2007.913021
Date:
March, 2008
File:
PDF, 1.43 MB
english, 2008