[IEEE 2001 8th International Symposium on the Physical and...

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[IEEE 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 - Singapore (9-13 July 2001)] Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) - Characterization of Cu extrusion failure mode in dual-damascene Cu/low-k interconnects under electromigration reliability test

Jeung-Woo Kim,, Won-Sang Song,, Sam-Young Kim,, Hyan-Soo Kim,, Hyun-Goo Jeon,, Chae-Bog Lim,
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Year:
2001
Language:
english
DOI:
10.1109/ipfa.2001.941480
File:
PDF, 558 KB
english, 2001
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