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[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Epi avoidance for CMOS logic devices using MeV implantation
Borland, J.O., Wristers, D., Walker, J.Year:
1997
Language:
english
DOI:
10.1109/iit.1996.586102
File:
PDF, 333 KB
english, 1997