A COMBINED SHOP FLOW CONTROL METHOD FOR THE WAFER...

Journal of the Chinese Institute of Industrial Engineers 2001 / 01 Vol. 18; Iss. 4

A COMBINED SHOP FLOW CONTROL METHOD FOR THE WAFER FABRICATION FACTORIES

Chang, Sheng-Hung, Chang, Kelvin, Li, Rong-Kwei
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Volume:
18
Language:
english
Journal:
Journal of the Chinese Institute of Industrial Engineers
DOI:
10.1080/10170660109509494
Date:
January, 2001
File:
PDF, 724 KB
english, 2001
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