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Scanning Electron Beam Lithography for Fabrication of Magnetic Bubble Circuits
Chang, T. H. P., Hatzakis, M., Wilson, A. D., Speth, A. J., Kern, A., Luhn, H.Volume:
20
Language:
english
Journal:
IBM Journal of Research and Development
DOI:
10.1147/rd.204.0376
Date:
July, 1976
File:
PDF, 863 KB
english, 1976