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[IEEE 2010 2nd International Conference on Mechanical and Electrical Technology (ICMET) - Singapore, Singapore (2010.09.10-2010.09.12)] 2010 International Conference on Mechanical and Electrical Technology - Design and simulation of touch mode MEMS capacitive pressure sensor
Sathyanarayanan, S., Juliet, A. VimalaYear:
2010
Language:
english
DOI:
10.1109/icmet.2010.5598346
File:
PDF, 614 KB
english, 2010