[IEEE 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation Proceedings, EFTA '97 - Los Angeles, CA, USA (9-12 Sept. 1997)] 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation Proceedings, EFTA '97 - Real time plasma etch process modeling by neural networks
Si, J., Yuan-Ling Tseng,, Clayton, M., Felker, S., Yoo, B., Martinez, J., Durham, J., Kim Dang,Year:
1997
Language:
english
DOI:
10.1109/etfa.1997.616294
File:
PDF, 540 KB
english, 1997