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[IEEE 2008 9th International Workshop and Tutorials on Electron Devices and Materials - Novosibirsk, Russia (2008.07.1-2008.07.5)] 2008 9th International Workshop and Tutorials on Electron Devices and Materials - Monte Carlo simulation of initial stages of Si (111) Oxidation by O2 near critical conditions
Gladkikh, Nadezhda A., Shwartz, Nataliya L., Sh.Yanovitskaja, ZoyaYear:
2008
Language:
english
DOI:
10.1109/sibedm.2008.4585846
File:
PDF, 276 KB
english, 2008