[IEEE 2008 IEEE International Conference on Microelectronic Test Structure (ICMTS) - Edinburgh, UK (2008.03.24-2008.03.27)] 2008 IEEE International Conference on Microelectronic Test Structures - Characterization of MOSFETs intrinsic performance using in-wafer advanced Kelvin-contact device structure for high performance CMOS LSIs
Rihito Kuroda,, Akinobu Teramoto,, Takanori Komuro,, Weitao Cheng,, Syunichi Watabe,, Ching Foa Tye,, Shigetoshi Sugawa,, Tadahiro Ohmi,Year:
2008
DOI:
10.1109/icmts.2008.4509331
File:
PDF, 371 KB
2008