[IEEE 2006 International Electron Devices Meeting - San Francisco, CA, USA (2006.12.11-2006.12.13)] 2006 International Electron Devices Meeting - Practical Vth Control Methods for Ni-FUSI/HfSiON MOSFETs on SOI Substrates
Terashima, Koichi, Manabe, Kenzo, Takahashi, Kensuke, Watanabe, Koji, Ogura, Takashi, Saitoh, Motofumi, Oshida, Makiko, Ikarashi, Nobuyuki, Tatsumi, Toru, Watanabe, HirohitoYear:
2006
Language:
english
DOI:
10.1109/iedm.2006.346760
File:
PDF, 384 KB
english, 2006