Optical and structural properties of silicon carbon nitride...

Optical and structural properties of silicon carbon nitride thin films deposited by reactive pulsed laser ablation

Neri, F., Tripodi, P., Trusso, S., Faggio, G.
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Volume:
165
Language:
english
Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/10420151003731678
Date:
October, 2010
File:
PDF, 351 KB
english, 2010
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