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Optical and structural properties of silicon carbon nitride thin films deposited by reactive pulsed laser ablation
Neri, F., Tripodi, P., Trusso, S., Faggio, G.Volume:
165
Language:
english
Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/10420151003731678
Date:
October, 2010
File:
PDF, 351 KB
english, 2010