![](/img/cover-not-exists.png)
[IEEE 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 - Singapore (9-13 July 2001)] Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) - The reactive ion etcher as a physical and failure analysis tool for FC-PGA packages
Ng Sea Chooi,Year:
2001
Language:
english
DOI:
10.1109/ipfa.2001.941475
File:
PDF, 717 KB
english, 2001