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[IEEE 2007 IEEE International Electron Devices Meeting - Washington, DC, USA (2007.12.10-2007.12.12)] 2007 IEEE International Electron Devices Meeting - Very Low Vt [Ir-Hf]/HfLaO CMOS Using Novel Self-Aligned Low Temperature Shallow Junctions
Cheng, C. F., Wu, C. H., Su, N. C., Wang, S. J., McAlister, S. P., Chin, AlbertYear:
2007
Language:
english
DOI:
10.1109/iedm.2007.4418939
File:
PDF, 2.90 MB
english, 2007