![](/img/cover-not-exists.png)
[IEEE 1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings - Sinaia, Romania (7-11 Oct. 1997)] 1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings - Optical properties of a-Si/sub 3/N/sub 4/ and a-SiO/sub x/N/sub y/
Modreanu, M., Tomozeiu, N., Cosmin, P., Gartner, M.Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/smicnd.1997.651270
File:
PDF, 256 KB
english, 1997