[IEEE 1997 International Semiconductor Conference 20th...

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[IEEE 1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings - Sinaia, Romania (7-11 Oct. 1997)] 1997 International Semiconductor Conference 20th Edition. CAS '97 Proceedings - Optical properties of a-Si/sub 3/N/sub 4/ and a-SiO/sub x/N/sub y/

Modreanu, M., Tomozeiu, N., Cosmin, P., Gartner, M.
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Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/smicnd.1997.651270
File:
PDF, 256 KB
english, 1997
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