A vacuum packaged surface micromachined resonant...

Journal of Microelectromechanical Systems 2002 / 12 Vol. 11; Iss. 6

A vacuum packaged surface micromachined resonant accelerometer

Seshia, A.A., Palaniapan, M., Roessig, T.A., Howe, R.T., Gooch, R.W., Schimert, T.R., Montague, S.
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Volume:
11
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2002.805207
Date:
December, 2002
File:
PDF, 825 KB
english, 2002
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