Elastomer-Based Pneumatic Switch for Radio Frequency...

Journal of Microelectromechanical Systems 2012 / 12 Vol. 21; Iss. 6

Elastomer-Based Pneumatic Switch for Radio Frequency Microdevices

Shah, Charan M., Sriram, Sharath, Bhaskaran, Madhu, Nasabi, Mahyar, Nguyen, Thach Giang, Rowe, Wayne S. T., Mitchell, Arnan
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Volume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2208220
Date:
December, 2012
File:
PDF, 1.02 MB
english, 2012
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