Temperature-Insensitive Composite Micromechanical...

Journal of Microelectromechanical Systems 2009 / 12 Vol. 18; Iss. 6

Temperature-Insensitive Composite Micromechanical Resonators

Melamud, R., Chandorkar, S.A., Bongsang Kim,, Hyung Kyu Lee,, Salvia, J.C., Bahl, G., Hopcroft, M.A., Kenny, T.W.
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Volume:
18
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2009.2030074
Date:
December, 2009
File:
PDF, 1.24 MB
english, 2009
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