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[Japan Soc. Appl. Phys 1999 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (14-16 June 1999)] 1999 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.99CH36325) - A self-aligned stacked capacitor using novel Pt electroplating method for 1 Gbit DRAMs and beyond
Horii, H., Byoung Taek Lee,, Han Jin Lim,, Suk Ho Joo,, Chang Seok Kang,, Cha Young Yoo,, Hong Bae Park,, Wan Don Kim,, Sang In Lee,, Moon Yong Lee,Year:
1999
Language:
english
DOI:
10.1109/vlsit.1999.799361
File:
PDF, 226 KB
english, 1999