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[IEEE IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - San Francisco, CA, USA (Dec. 13-15, 2004)] IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - Evaluation of fermi level pinning in low, midgap and high workfunction metal cate electrodes on ALD and MOCVD HfO/sub 2/ under high temperature exposure
Jha, R., JaeHoon Lee,, Bei Chen,, Lazar, H., Gurganus, J., Biswas, N., Majhi, P., Brown, G., Misra, V.Year:
2004
Language:
english
DOI:
10.1109/iedm.2004.1419137
File:
PDF, 308 KB
english, 2004