[IEEE ASDAM '98. Conference Proceedings. Second International Conference on Advances Semiconductor Devices and Microsystems - Smolenice Castle, Slovakia (5-7 Oct. 1998)] ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) - T-shaped gate based on poly Si/polyimide supported layers
Lalinsky, T., Hrkut, P., Matay, L., Kostic, I., Hascik, S., Hudek, P.Year:
1998
Language:
english
DOI:
10.1109/asdam.1998.730194
File:
PDF, 442 KB
english, 1998