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Multilayer Thickness Determination Using Continuous Wave THz Spectroscopy
Stanze, Dennis, Globisch, Bjorn, Dietz, Roman J. B., Roehle, Helmut, Gobel, Thorsten, Schell, MartinVolume:
4
Language:
english
Journal:
IEEE Transactions on Terahertz Science and Technology
DOI:
10.1109/tthz.2014.2348414
Date:
November, 2014
File:
PDF, 1.28 MB
english, 2014