[IEEE Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004. - Nagoya, Japan (Oct. 31-Nov. 3, 2004)] Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004. - Tensile test of single crystal silicon film at elevated temperatures
Nakao, S., Ando, T., Shikida, M., Sato, K.Year:
2004
Language:
english
DOI:
10.1109/mhs.2004.1421278
File:
PDF, 1.14 MB
english, 2004