[IEEE IEEE MTT-S International Microwave Symposium - IMS 2003 - Philadelphia, PA, USA (8-13 June 2003)] IEEE MTT-S International Microwave Symposium Digest, 2003 - Silicon carbide for RF MEMS
Melzak, J.M.Volume:
3
Year:
2003
Language:
english
DOI:
10.1109/mwsym.2003.1210450
File:
PDF, 445 KB
english, 2003