[IEEE 2006 International Symposium on Semiconductor Manufacturing (ISSM) - Tokyo, Japan (2006.09.25-2006.09.27)] 2006 IEEE International Symposium on Semiconductor Manufacturing - Method of Minimizing Inspection Cost by Making Use of Programmed Defect Array
Hayano, Takahide, Tu, Amy, Hance, Bryon, Doan, Samantha, Sakai, Stacy, Shindo, WatamuYear:
2006
Language:
english
DOI:
10.1109/issm.2006.4493010
File:
PDF, 1.86 MB
english, 2006