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[IEEE Sixth International Conference Metalorganic Vapor Phase Epitaxy - Cambridge, MA (June 8-11, 1992)] Sixth International Conference Metalorganic Vapor Phase Epitaxy - The Decomposition of Tertiarybutyl Phosphine and Related Precursors During lnP MOCVD Growth Studied by FTIR Spectroscopy
Fan, G.H., Hoare, R.D., Pemble, M.E., Povey, I.M., Williams, J.O.Year:
1992
Language:
english
DOI:
10.1109/movpe.1992.664966
File:
PDF, 72 KB
english, 1992