Performance of DC SQUIDs fabricated on 4-inch silicon wafer

IEEE Transactions on Appiled Superconductivity 1993 / 3 Vol. 3; Iss. 1

Performance of DC SQUIDs fabricated on 4-inch silicon wafer

Shimizu, N., Chiba, N., Yabe, S., Ishikawa, T., Chinone, K., Kiryu, S.
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Volume:
3
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/77.233326
Date:
March, 1993
File:
PDF, 789 KB
english, 1993
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