Row/Column Addressing Scheme for Large Electrostatic...

Journal of Microelectromechanical Systems 2008 / 10 Vol. 17; Iss. 5

Row/Column Addressing Scheme for Large Electrostatic Actuator MEMS Switch Arrays and Optimization of the Operational Reliability by Statistical Analysis

Braun, S., Oberhammer, J., Stemme, G.
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Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2008.928710
Date:
October, 2008
File:
PDF, 1.08 MB
english, 2008
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