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[IEEE Ninth Biennial University/Government/Industry Microelectronics Symposium - Melbourne, FL, USA (12-14 June 1991)] Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium - The use of short cycle test chips to accelerate yield learning during the start up of a 150 mm fabrication facility
McDaniel, J., Moursund, D., Silsby, C., Winnett, J.Year:
1991
Language:
english
DOI:
10.1109/ugim.1991.148139
File:
PDF, 463 KB
english, 1991